Development of an SU-8 MEMS process with two metal electrodes using amorphous silicon as a sacrificial material

Engineering

• Conductive 100%
• Metal Layer 50%
• Electrostatic Actuation 50%
• Process Parameter 50%
• Surface Micro-Machining 50%
• Stiction 50%

Material Science

• Amorphous Silicon 100%
• Capacitor 66%
• Actuator 33%
• Micromachining 33%
• Biocompatibility 33%

Keyphrases

• Switched Capacitor 33%
• Sacrificial Layer 33%
• MEMS Structure 16%
• Drying Methods 16%
• Microfluidic Applications 16%
• Large Thickness 16%