Abstract
In this paper, a multilayer one-dimensional photonic crystal (1D-PhC) based device is proposed for sensing applications. The structural design parameters are optimized to have good sensitivity along with low fabrication complexity. The proposed design is fabricated using Plasma-Enhanced-Chemical-Vapor-Deposition (PECVD) deposition technique followed by structural characterization. Finally, detailed sensing analysis of fabricated structure is carried out using in-house developed setup. The proposed structure demonstrates a 0.035 nm shift in reflected/transmitted wavelength with corresponding refractive index change of 10−3. Thus, showing it potential applications in integrated senor platforms.
Original language | English (US) |
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Journal | Optik |
Volume | 223 |
DOIs | |
State | Published - Dec 1 2020 |
Externally published | Yes |
ASJC Scopus subject areas
- Atomic and Molecular Physics, and Optics
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering