Development of untethered SU-8 polymer scratch drive microrobots

Manuel Valencia Garcia, Tarek Nabil Atallah, David Castro, David Conchouso Gonzalez, Mishari Ibraheem Al Dosari, Rafat Hammad, Ehab Jamal Al Rawashdeh, Amir Omar Zaher, Jürgen Kosel, Ian G. Foulds

Research output: Chapter in Book/Report/Conference proceedingConference contribution

12 Scopus citations


This paper presents the design, simulation, fabrication and testing of novel, untethered SU-8 polymer microrobots based on scratch drive actuators (SDAs). The design consists of two 100×120×10μm linked SDAs, individually operated close to their resonant frequencies. The resonant frequency and deflection behavior of an individual SDA can be controlled by its shape, thickness, and stiffening design features. As a result, paired SDAs can be actuated individually or simultaneously by a multifrequency driving signal, allowing for two-dimensional displacement. The fabrication process uses SU-8 as structural material and PMGI as sacrificial material. The SU-8 provides a flexible material for the SDA's plates as well as the bushing. Finally, a Cr/Au layer is blanket deposited to provide electrical conductivity.
Original languageEnglish (US)
Title of host publication2011 IEEE 24th International Conference on Micro Electro Mechanical Systems
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Print)9781424496327
StatePublished - Jan 2011


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