Differential RF MEMS interwoven capacitor immune to residual stress warping

Keyphrases

• Interwoven Structure 100%
• RF MEMS Capacitor 50%
• MEMS Process 50%
• Fabrication Challenges 50%
• GHz Range 50%
• Plate Design 50%

Engineering

• Residual Stress 100%
• Resonant Frequency 50%
• Quality Factor 50%
• Parallel Plate 50%
• Stiction 50%

Material Science

• Residual Stress 100%
• Capacitor 100%