Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Yves Emery; Etienne Cuche; François Marquet; Nicolas Aspert; Pierre Marquet; Jonas Kuhn; Mikhail Botkine; Tristan Colomb; Frédéric Montfort; Florian Charrière; Christian Depeursinge; Patrick Debergh; Ramiro Conde

doi:10.1117/12.660029

Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Yves Emery^*, Etienne Cuche, François Marquet, Nicolas Aspert, Pierre Marquet, Jonas Kuhn, Mikhail Botkine, Tristan Colomb, Frédéric Montfort, Florian Charrière, Christian Depeursinge, Patrick Debergh, Ramiro Conde

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

21 Scopus citations

Abstract

Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micro-mirror. This enables the definition of the linear, non-linear, and modal resocnance zones of its dynamical response.

Original language	English (US)
Title of host publication	MEMS, MOEMS, and Micromachining II
DOIs	https://doi.org/10.1117/12.660029
State	Published - 2006
Externally published	Yes
Event	MEMS, MOEMS, and Micromachining II - Strasbourg, France Duration: Apr 3 2006 → Apr 4 2006

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6186
ISSN (Print)	0277-786X

Other

Other	MEMS, MOEMS, and Micromachining II
Country/Territory	France
City	Strasbourg
Period	04/3/06 → 04/4/06

Keywords

Digital Holography Microscopy
MEMS
MOEMS
Real time 3D optical topography

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Applied Mathematics
Electrical and Electronic Engineering
Computer Science Applications

Access to Document

10.1117/12.660029

Cite this

Emery, Y., Cuche, E., Marquet, F., Aspert, N., Marquet, P., Kuhn, J., Botkine, M., Colomb, T., Montfort, F., Charrière, F., Depeursinge, C., Debergh, P., & Conde, R. (2006). Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS. In MEMS, MOEMS, and Micromachining II Article 61860N (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6186). https://doi.org/10.1117/12.660029

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title = "Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS",

abstract = "Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micro-mirror. This enables the definition of the linear, non-linear, and modal resocnance zones of its dynamical response.",

keywords = "Digital Holography Microscopy, MEMS, MOEMS, Real time 3D optical topography",

author = "Yves Emery and Etienne Cuche and Fran{\c c}ois Marquet and Nicolas Aspert and Pierre Marquet and Jonas Kuhn and Mikhail Botkine and Tristan Colomb and Fr{\'e}d{\'e}ric Montfort and Florian Charri{\`e}re and Christian Depeursinge and Patrick Debergh and Ramiro Conde",

year = "2006",

doi = "10.1117/12.660029",

language = "English (US)",

isbn = "081946242X",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "MEMS, MOEMS, and Micromachining II",

note = "MEMS, MOEMS, and Micromachining II ; Conference date: 03-04-2006 Through 04-04-2006",

}

Emery, Y, Cuche, E, Marquet, F, Aspert, N, Marquet, P, Kuhn, J, Botkine, M, Colomb, T, Montfort, F, Charrière, F, Depeursinge, C, Debergh, P & Conde, R 2006, Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS. in MEMS, MOEMS, and Micromachining II., 61860N, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6186, MEMS, MOEMS, and Micromachining II, Strasbourg, France, 04/3/06. https://doi.org/10.1117/12.660029

Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS. / Emery, Yves; Cuche, Etienne; Marquet, François et al.
MEMS, MOEMS, and Micromachining II. 2006. 61860N (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6186).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

AU - Emery, Yves

AU - Cuche, Etienne

AU - Marquet, François

AU - Aspert, Nicolas

AU - Marquet, Pierre

AU - Kuhn, Jonas

AU - Botkine, Mikhail

AU - Colomb, Tristan

AU - Montfort, Frédéric

AU - Charrière, Florian

AU - Depeursinge, Christian

AU - Debergh, Patrick

AU - Conde, Ramiro

PY - 2006

Y1 - 2006

N2 - Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micro-mirror. This enables the definition of the linear, non-linear, and modal resocnance zones of its dynamical response.

AB - Digital Holographic Microscopes (DHM) enables recording the whole information necessary to provide real time nanometric vertical displacement measurements with a single image acquisition. The use of fast acquisition camera or stroboscopic acquisition mode makes these new systems ideal tools for investigating the topography and dynamical behavior of MEMS and MOEMS. This is illustrated by the investigation of resonant frequencies of a dual axis micro-mirror. This enables the definition of the linear, non-linear, and modal resocnance zones of its dynamical response.

KW - Digital Holography Microscopy

KW - MEMS

KW - MOEMS

KW - Real time 3D optical topography

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SN - 081946242X

SN - 9780819462428

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - MEMS, MOEMS, and Micromachining II

T2 - MEMS, MOEMS, and Micromachining II

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ER -

Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

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ASJC Scopus subject areas

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