Digital Holographic Microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS

Yves Emery^*, Etienne Cuche, François Marquet, Nicolas Aspert, Pierre Marquet, Jonas Kuhn, Mikhail Botkine, Tristan Colomb, Frédéric Montfort, Florian Charrière, Christian Depeursinge, Patrick Debergh, Ramiro Conde

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review