Diode behavior in ultra-thin low temperature ALD grown zinc-oxide on silicon

Nazek El-Atab, Samar Alqatari, Feyza B. Oruc, Tewfic Souier, Matteo Chiesa, Ali K. Okyay, Ammar Nayfeh

Research output: Contribution to journalArticlepeer-review

37 Scopus citations

Abstract

A thin-film ZnO(n)/Si(p+) heterojunction diode is demonstrated. The thin film ZnO layer is deposited by Atomic Layer Deposition (ALD) at different temperatures on a p-type silicon substrate. Atomic force microscopy (AFM) AC-in-Air method in addition to conductive AFM (CAFM) were used for the characterization of ZnO layer and to measure the current-voltage characteristics. Forward and reverse bias n-p diode behavior with good rectification properties is achieved. The diode with ZnO grown at 80°C exhibited the highest on/off ratio with a turn-on voltage (VON) ∼3.5 V. The measured breakdown voltage (VBR) and electric field (EBR) for this diode are 5.4 V and 3.86 MV/cm, respectively.

Original languageEnglish (US)
Article number102119
JournalAIP ADVANCES
Volume3
Issue number10
DOIs
StatePublished - Oct 2013
Externally publishedYes

ASJC Scopus subject areas

  • General Physics and Astronomy

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