Diode behavior in ultra-thin low temperature ALD grown zinc-oxide on silicon

Engineering

• Low-Temperature 100%
• Thin Films 100%
• Atomic Layer Deposition 100%
• Silicon Substrate 50%
• Forward Bias 50%
• Electric Field 50%
• Reverse Bias 50%
• Conductive Atomic Force Microscopy 50%
• Atomic Force Microscopy 50%
• Rectification 50%
• Heterojunctions 50%
• Breakdown Voltage 50%

Material Science

• Zinc Oxide 100%
• ZnO 100%
• Atomic Force Microscopy 50%
• Thin Films 50%
• Heterojunction 25%
• Current Voltage Characteristics 25%

Keyphrases

• Oxides on Silicon 100%
• Low-temperature Atomic Layer Deposition 100%