Dual-Band 60/77 GHz MEMS Antenna on High-Resistivity Silicon

M. O. Sallam; E. A. Soliman; S. Hassan; S. Sedky

Dual-Band 60/77 GHz MEMS Antenna on High-Resistivity Silicon

M. O. Sallam, E. A. Soliman, S. Hassan, S. Sedky

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

A novel MEMS antenna is introduced in this paper. This antenna is capable of operating at both 60 GHz and 77 GHz. The proposed antenna enjoys good isolation from the driving circuit, low fabrication cost, and high mechanical stability. These features are achieved together via a new fabrication technology that allows the realization of MEMS antennas with ground plane isolation from the driving circuits using one silicon wafer only. The new antenna is rigorously characterized via two well-known software packages. Based on the very good agreement between them, it can be concluded that the proposed antenna is resonating at the desired two frequencies, radiating almost isotropicaly from one side of the substrate with good front-to-back ratio, providing low cross-polarization level, and enjoying high gain and very high radiation efficiency at both frequencies of operation.

Original language	English (US)
Title of host publication	41st European Microwave Conference (EuMC)
Publisher	IEEE
Pages	1023-1026
Number of pages	4
State	Published - 2011
Externally published	Yes

Cite this

@inproceedings{d12d34e701044f319a0ab27485c5fce3,

title = "Dual-Band 60/77 GHz MEMS Antenna on High-Resistivity Silicon",

abstract = "A novel MEMS antenna is introduced in this paper. This antenna is capable of operating at both 60 GHz and 77 GHz. The proposed antenna enjoys good isolation from the driving circuit, low fabrication cost, and high mechanical stability. These features are achieved together via a new fabrication technology that allows the realization of MEMS antennas with ground plane isolation from the driving circuits using one silicon wafer only. The new antenna is rigorously characterized via two well-known software packages. Based on the very good agreement between them, it can be concluded that the proposed antenna is resonating at the desired two frequencies, radiating almost isotropicaly from one side of the substrate with good front-to-back ratio, providing low cross-polarization level, and enjoying high gain and very high radiation efficiency at both frequencies of operation.",

author = "Sallam, {M. O.} and Soliman, {E. A.} and S. Hassan and S. Sedky",

note = "KAUST Repository Item: Exported on 2022-06-23 Acknowledged KAUST grant number(s): UK-C0015 OUK Acknowledgements: This publication is based on work supported by award number: UK-C0015 OUK made by King Abdullah University of Science and Technology (KAUST). This publication acknowledges KAUST support, but has no KAUST affiliated authors.",

year = "2011",

language = "English (US)",

pages = "1023--1026",

booktitle = "41st European Microwave Conference (EuMC)",

publisher = "IEEE",

}

TY - GEN

T1 - Dual-Band 60/77 GHz MEMS Antenna on High-Resistivity Silicon

AU - Sallam, M. O.

AU - Soliman, E. A.

AU - Hassan, S.

AU - Sedky, S.

N1 - KAUST Repository Item: Exported on 2022-06-23 Acknowledged KAUST grant number(s): UK-C0015 OUK Acknowledgements: This publication is based on work supported by award number: UK-C0015 OUK made by King Abdullah University of Science and Technology (KAUST). This publication acknowledges KAUST support, but has no KAUST affiliated authors.

PY - 2011

Y1 - 2011

N2 - A novel MEMS antenna is introduced in this paper. This antenna is capable of operating at both 60 GHz and 77 GHz. The proposed antenna enjoys good isolation from the driving circuit, low fabrication cost, and high mechanical stability. These features are achieved together via a new fabrication technology that allows the realization of MEMS antennas with ground plane isolation from the driving circuits using one silicon wafer only. The new antenna is rigorously characterized via two well-known software packages. Based on the very good agreement between them, it can be concluded that the proposed antenna is resonating at the desired two frequencies, radiating almost isotropicaly from one side of the substrate with good front-to-back ratio, providing low cross-polarization level, and enjoying high gain and very high radiation efficiency at both frequencies of operation.

AB - A novel MEMS antenna is introduced in this paper. This antenna is capable of operating at both 60 GHz and 77 GHz. The proposed antenna enjoys good isolation from the driving circuit, low fabrication cost, and high mechanical stability. These features are achieved together via a new fabrication technology that allows the realization of MEMS antennas with ground plane isolation from the driving circuits using one silicon wafer only. The new antenna is rigorously characterized via two well-known software packages. Based on the very good agreement between them, it can be concluded that the proposed antenna is resonating at the desired two frequencies, radiating almost isotropicaly from one side of the substrate with good front-to-back ratio, providing low cross-polarization level, and enjoying high gain and very high radiation efficiency at both frequencies of operation.

UR - http://hdl.handle.net/10754/679271

M3 - Conference contribution

SP - 1023

EP - 1026

BT - 41st European Microwave Conference (EuMC)

PB - IEEE

ER -

Dual-Band 60/77 GHz MEMS Antenna on High-Resistivity Silicon

Abstract

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