Abstract
We present a dynamic analysis and simulation of electrically actuated microelectromechanical systems (MEMS) resonators under primary-resonance excitation. We use a shooting technique, perturbation techniques, and long-time integration of the equation of motion to investigate the global dynamics of the resonators. We study the dynamic pull-in instability and show various scenarios and mechanisms for its occurrence. Our results show that dynamic pull-in can occur through a saddle-node bifurcation, a period-doubling bifurcation, or homoclinic tangling, depending on factors such as the initial conditions of the device and the level of the electrostatic force.
| Original language | English (US) |
|---|---|
| Title of host publication | Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005 |
| Subtitle of host publication | 20th Biennial Conf. on Mechanical Vibration and Noise |
| Pages | 397-404 |
| Number of pages | 8 |
| Volume | 1 A |
| State | Published - 2005 |
| Externally published | Yes |
| Event | DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Long Beach, CA, United States Duration: Sep 24 2005 → Sep 28 2005 |
Other
| Other | DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference |
|---|---|
| Country/Territory | United States |
| City | Long Beach, CA |
| Period | 09/24/05 → 09/28/05 |
ASJC Scopus subject areas
- Engineering(all)