Dynamic analysis of mems resonators under primary-resonance excitation

Ali H. Nayfeh; Mohammad I. Younis; Eihab M. Abdel-Rahman

doi:10.1115/detc2005-84146

Dynamic analysis of mems resonators under primary-resonance excitation

Ali H. Nayfeh^*, Mohammad I. Younis, Eihab M. Abdel-Rahman

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

10 Scopus citations

Abstract

We present a dynamic analysis and simulation of electrically actuated microelectromechanical systems (MEMS) resonators under primary-resonance excitation. We use a shooting technique, perturbation techniques, and long-time integration of the equation of motion to investigate the global dynamics of the resonators. We study the dynamic pull-in instability and show various scenarios and mechanisms for its occurrence. Our results show that dynamic pull-in can occur through a saddle-node bifurcation, a period-doubling bifurcation, or homoclinic tangling, depending on factors such as the initial conditions of the device and the level of the electrostatic force.

Original language	English (US)
Title of host publication	Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005
Subtitle of host publication	20th Biennial Conf. on Mechanical Vibration and Noise
Publisher	American Society of Mechanical Engineers
Pages	397-404
Number of pages	8
ISBN (Print)	0791847381, 9780791847381
DOIs	https://doi.org/10.1115/detc2005-84146
State	Published - 2005
Externally published	Yes
Event	DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - Long Beach, CA, United States Duration: Sep 24 2005 → Sep 28 2005

Publication series

Name	Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005
Volume	1 A

Other

Other	DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference
Country/Territory	United States
City	Long Beach, CA
Period	09/24/05 → 09/28/05

ASJC Scopus subject areas

General Engineering

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10.1115/detc2005-84146

Cite this

Nayfeh, A. H., Younis, M. I., & Abdel-Rahman, E. M. (2005). Dynamic analysis of mems resonators under primary-resonance excitation. In Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mechanical Vibration and Noise (pp. 397-404). (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005; Vol. 1 A). American Society of Mechanical Engineers. https://doi.org/10.1115/detc2005-84146

Nayfeh, Ali H. ; Younis, Mohammad I. ; Abdel-Rahman, Eihab M. / Dynamic analysis of mems resonators under primary-resonance excitation. Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mechanical Vibration and Noise. American Society of Mechanical Engineers, 2005. pp. 397-404 (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005).

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title = "Dynamic analysis of mems resonators under primary-resonance excitation",

abstract = "We present a dynamic analysis and simulation of electrically actuated microelectromechanical systems (MEMS) resonators under primary-resonance excitation. We use a shooting technique, perturbation techniques, and long-time integration of the equation of motion to investigate the global dynamics of the resonators. We study the dynamic pull-in instability and show various scenarios and mechanisms for its occurrence. Our results show that dynamic pull-in can occur through a saddle-node bifurcation, a period-doubling bifurcation, or homoclinic tangling, depending on factors such as the initial conditions of the device and the level of the electrostatic force.",

author = "Nayfeh, {Ali H.} and Younis, {Mohammad I.} and Abdel-Rahman, {Eihab M.}",

year = "2005",

doi = "10.1115/detc2005-84146",

language = "English (US)",

isbn = "0791847381",

series = "Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005",

publisher = "American Society of Mechanical Engineers",

pages = "397--404",

booktitle = "Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005",

note = "DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference ; Conference date: 24-09-2005 Through 28-09-2005",

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Nayfeh, AH, Younis, MI & Abdel-Rahman, EM 2005, Dynamic analysis of mems resonators under primary-resonance excitation. in Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mechanical Vibration and Noise. Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005, vol. 1 A, American Society of Mechanical Engineers, pp. 397-404, DETC2005: ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, Long Beach, CA, United States, 09/24/05. https://doi.org/10.1115/detc2005-84146

Dynamic analysis of mems resonators under primary-resonance excitation. / Nayfeh, Ali H.; Younis, Mohammad I.; Abdel-Rahman, Eihab M.
Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mechanical Vibration and Noise. American Society of Mechanical Engineers, 2005. p. 397-404 (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005; Vol. 1 A).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Dynamic analysis of mems resonators under primary-resonance excitation

AU - Nayfeh, Ali H.

AU - Younis, Mohammad I.

AU - Abdel-Rahman, Eihab M.

PY - 2005

Y1 - 2005

N2 - We present a dynamic analysis and simulation of electrically actuated microelectromechanical systems (MEMS) resonators under primary-resonance excitation. We use a shooting technique, perturbation techniques, and long-time integration of the equation of motion to investigate the global dynamics of the resonators. We study the dynamic pull-in instability and show various scenarios and mechanisms for its occurrence. Our results show that dynamic pull-in can occur through a saddle-node bifurcation, a period-doubling bifurcation, or homoclinic tangling, depending on factors such as the initial conditions of the device and the level of the electrostatic force.

AB - We present a dynamic analysis and simulation of electrically actuated microelectromechanical systems (MEMS) resonators under primary-resonance excitation. We use a shooting technique, perturbation techniques, and long-time integration of the equation of motion to investigate the global dynamics of the resonators. We study the dynamic pull-in instability and show various scenarios and mechanisms for its occurrence. Our results show that dynamic pull-in can occur through a saddle-node bifurcation, a period-doubling bifurcation, or homoclinic tangling, depending on factors such as the initial conditions of the device and the level of the electrostatic force.

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DO - 10.1115/detc2005-84146

M3 - Conference contribution

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SN - 9780791847381

T3 - Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005

SP - 397

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Nayfeh AH, Younis MI, Abdel-Rahman EM. Dynamic analysis of mems resonators under primary-resonance excitation. In Proc. of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conferences - DETC2005: 20th Biennial Conf. on Mechanical Vibration and Noise. American Society of Mechanical Engineers. 2005. p. 397-404. (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference - DETC2005). doi: 10.1115/detc2005-84146

Dynamic analysis of mems resonators under primary-resonance excitation

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