Abstract
We report the optical properties of SU-8 in the mid-infrared (mid-IR) region before and after UV treatment. Samples consisted of SU-8 films of thickness ranging from 10 um to 157 um deposited on gold coated silicon substrates and were prepared using spin coating. Mid-IR diffuse reflectance measurements were conducted using Fourier transform infrared spectroscopy. Spectra measurements imply a change in optical properties of SU-8 upon exposure to UV and heat treatment. A gradual change in optical properties is seen after each step of UV treatment and the baking process. Reflectance spectra of thin-films were also observed to be thickness dependent. We calculate the dielectric function of SU-8 in the range 2 um to 15 um using the reflectance spectra of the samples.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2017-2025 |
| Number of pages | 9 |
| Journal | OPTICAL MATERIALS EXPRESS |
| Volume | 8 |
| Issue number | 7 |
| DOIs | |
| State | Published - Jan 1 2018 |
| Externally published | Yes |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials