@inproceedings{441bdd138621483c892f0b22a56218fb,
title = "Dynamical integrity for interpreting experimental data and ensuring safety in electrostatic MEMS",
abstract = "A dynamical integrity analysis is performed for an electrostatic microelectro- mechanical system (MEMS) device. The analysis starts from the experimental data of dynamic pull-in due to a frequency-sweeping process in a capacitive accelerometer. The loss of dynamical integrity is investigated by curves of constant percentage of integrity factor. We found that these curves follow exactly the experimental data and succeed in interpreting the existence of disturbances. On the other hand, instead, the theoretical curves of disappearance of the attractors represent the limit when disturbances are absent, which never occurs in practice. Also, the obtained behavior chart can serve as a design guideline in order to ensure safety of the device.",
keywords = "Dynamic pull-in, Dynamical integrity, Integrity factor, MEMS",
author = "Laura Ruzziconi and Younis, {Mohammad I.} and Stefano Lenci",
note = "Publisher Copyright: {\textcopyright} Springer Science+Business Media Dordrecht 2013.; IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design, 2010 ; Conference date: 27-07-2010 Through 30-07-2010",
year = "2013",
doi = "10.1007/978-94-007-5742-420",
language = "English (US)",
isbn = "9789400757417",
series = "IUTAM Bookseries",
publisher = "Springer Verlag",
pages = "249--261",
editor = "Giuseppe Rega and Marian Wiercigroch",
booktitle = "IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design - Proceedings of the IUTAM Symposium on Nonlinear Dynamics for Advanced Technologies and Engineering Design",
address = "Germany",
}