Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame

Rodrigo Tumolin Rocha; Nouha Alcheikh; Fahimullah Khan; Mohammad I. Younis

doi:10.1109/JMEMS.2020.3020230

Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame

Rodrigo Tumolin Rocha, Nouha Alcheikh, Fahimullah Khan, Mohammad I. Younis

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and the symmetric (second) modes. Experimental results show high tunability of the resonance frequencies of both modes due to the electrostatic forces. Finite element simulations show good agreement with the experimental measurements. Further simulations are presented for the tunability of the natural frequencies of other higher-order modes using various electrode configurations. Frequency-response curves are presented for pure AC actuation of the first two modes showing strong nonlinear softening behavior due to the geometric nonlinearities of the portal frame. [2020-0269]

Original language	English (US)
Pages (from-to)	1-10
Number of pages	10
Journal	Journal of Microelectromechanical Systems
DOIs	https://doi.org/10.1109/JMEMS.2020.3020230
State	Published - 2020

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10.1109/JMEMS.2020.3020230

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title = "Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame",

abstract = "We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and the symmetric (second) modes. Experimental results show high tunability of the resonance frequencies of both modes due to the electrostatic forces. Finite element simulations show good agreement with the experimental measurements. Further simulations are presented for the tunability of the natural frequencies of other higher-order modes using various electrode configurations. Frequency-response curves are presented for pure AC actuation of the first two modes showing strong nonlinear softening behavior due to the geometric nonlinearities of the portal frame. [2020-0269]",

author = "Rocha, {Rodrigo Tumolin} and Nouha Alcheikh and Fahimullah Khan and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2020-10-01",

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doi = "10.1109/JMEMS.2020.3020230",

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journal = "Journal of Microelectromechanical Systems",

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TY - JOUR

T1 - Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame

AU - Rocha, Rodrigo Tumolin

AU - Alcheikh, Nouha

AU - Khan, Fahimullah

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2020

Y1 - 2020

N2 - We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and the symmetric (second) modes. Experimental results show high tunability of the resonance frequencies of both modes due to the electrostatic forces. Finite element simulations show good agreement with the experimental measurements. Further simulations are presented for the tunability of the natural frequencies of other higher-order modes using various electrode configurations. Frequency-response curves are presented for pure AC actuation of the first two modes showing strong nonlinear softening behavior due to the geometric nonlinearities of the portal frame. [2020-0269]

AB - We present a study of the natural (resonance) frequencies of a tunable in-plane Microelectromechanical portal frame (U-shape) under DC electrostatic loads. The structure is designed and fabricated to excite the in-plane anti-symmetric (sway, first) and the symmetric (second) modes. Experimental results show high tunability of the resonance frequencies of both modes due to the electrostatic forces. Finite element simulations show good agreement with the experimental measurements. Further simulations are presented for the tunability of the natural frequencies of other higher-order modes using various electrode configurations. Frequency-response curves are presented for pure AC actuation of the first two modes showing strong nonlinear softening behavior due to the geometric nonlinearities of the portal frame. [2020-0269]

UR - http://hdl.handle.net/10754/665059

UR - https://ieeexplore.ieee.org/document/9187530/

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DO - 10.1109/JMEMS.2020.3020230

M3 - Article

SN - 1941-0158

SP - 1

EP - 10

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

ER -

Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame

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