Dynamics of an electrically actuated resonant microsensor

Engineering

• Microsensor 100%
• Nonlinearity 66%
• Frequency Response Curve 66%
• Restoring Force 66%
• Electrostatics 66%
• Experimental Result 33%
• Nonlinear Model 33%
• Hardening Behavior 33%
• Design Parameter 33%
• Multiple Scale 33%
• Device Behavior 33%
• Obtains 33%
• Couplings 33%
• Dynamic Loads 33%
• Distributed Parameter System 33%
• Axial Load 33%

Keyphrases

• Subharmonic Excitation 66%
• Superharmonic Excitation 66%
• Primary Excitation 66%
• Sudden Jump 33%
• Moderately Large Deflections 33%
• Gap Capacitor 33%
• Perturbation Results 33%
• Dynamic Load 33%