Keyphrases
MEMS Resonator
100%
Subharmonic Excitation
100%
Superharmonic Excitation
100%
Microbeam
75%
Frequency Response Curve
75%
Fundamental Natural Frequency
50%
Highly Sensitive
25%
Order of Magnitude
25%
Electrostatic Force
25%
Frequency Response
25%
Radio Frequency Microelectromechanical Systems (RF MEMS)
25%
Electrically Actuated
25%
Electric Load
25%
Dynamic Pull-in
25%
Transient State
25%
Subharmonic Resonance
25%
Frequency Tuning
25%
DC Bias
25%
Stopband
25%
Large-scale Motions
25%
Secondary Resonance
25%
Resonant Excitation
25%
Excitation Amplitude
25%
Primary Resonance Excitation
25%
Excitation Method
25%
Small Motion
25%
Steady-state Dynamics
25%
AC Excitation
25%
Harmonic Force
25%
All-frequency
25%
MEMS Filter
25%
Engineering
Frequency Response Curve
100%
Resonator
100%
Dc Voltage
66%
Natural Frequency
66%
Quality Factor
33%
Promising Candidate
33%
Primary Resonance
33%
Dynamic State
33%
Electric Loads
33%
Excitation Method
33%
Transients
33%
Harmonics
33%
Passbands
33%
Frequency Response
33%
Electrostatics
33%