Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

Nouha Alcheikh; Hassen M. Ouakad; Mohammad I. Younis

doi:10.1109/JMEMS.2020.3018193

Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

Nouha Alcheikh, Hassen M. Ouakad, Mohammad I. Younis

Research output: Contribution to journal › Article › peer-review

16 Scopus citations

Abstract

In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]

Original language	English (US)
Pages (from-to)	1-10
Number of pages	10
Journal	Journal of Microelectromechanical Systems
DOIs	https://doi.org/10.1109/JMEMS.2020.3018193
State	Published - 2020

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10.1109/JMEMS.2020.3018193

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title = "Dynamics of V-Shaped Electrothermal MEMS-Based Resonators",

abstract = "In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]",

author = "Nouha Alcheikh and Ouakad, {Hassen M.} and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2020-10-01",

year = "2020",

doi = "10.1109/JMEMS.2020.3018193",

language = "English (US)",

pages = "1--10",

journal = "Journal of Microelectromechanical Systems",

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TY - JOUR

T1 - Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

AU - Alcheikh, Nouha

AU - Ouakad, Hassen M.

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2020

Y1 - 2020

N2 - In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]

AB - In this work, we study experimentally, analytically, and numerically the dynamics of electrothermally actuated micro-electro-mechanical V-shaped micro-beam resonators. Upon actuating the micro-beams electrothermally, we examine the various scenarios of natural frequencies crossing and avoided-crossing (veering) among the various vibration modes. The effect of various parameters is experimentally investigated on the veering and crossing including the micro-beam width and the initial rise at the mid-point. An analytical study is presented based on a reduced order model of a nonlinear Euler-Bernoulli shallow arch beam model. The dynamic behavior is also confirmed through a multi-physics finite-element model (FEM). The static and dynamic behaviors of the V-shaped micro-beams are compared against those of Arc-shaped micro-beams. [2020-0232]

UR - http://hdl.handle.net/10754/664991

UR - https://ieeexplore.ieee.org/document/9181413/

U2 - 10.1109/JMEMS.2020.3018193

DO - 10.1109/JMEMS.2020.3018193

M3 - Article

SN - 1941-0158

SP - 1

EP - 10

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

ER -

Dynamics of V-Shaped Electrothermal MEMS-Based Resonators

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