Effect of growth conditions on the Al composition and optical properties of Al x Ga 1−x N layers grown by atmospheric-pressure metal organic vapor phase epitaxy

S. Soltani; M. Bouzidi; Z. Chine; A. Toure; I. Halidou; B. El Jani; M. K. Shakfa

doi:10.1016/j.tsf.2017.02.039

Effect of growth conditions on the Al composition and optical properties of Al x Ga 1−x N layers grown by atmospheric-pressure metal organic vapor phase epitaxy

S. Soltani, M. Bouzidi, Z. Chine, A. Toure, I. Halidou, B. El Jani, M. K. Shakfa

Computer, Electrical and Mathematical Sciences and Engineering

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2 Scopus citations

Abstract

The effect of growth conditions on the Al composition and optical properties of AlxGa1-xN layers grown by atmospheric-pressure metal organic vapor phase epitaxy is investigated. The Al content of the samples is varied between 3.0% and 9.3% by changing the gas flow rate of either trimethylaluminum (TMA) or trimethylgallium (TMG) while other growth parameters are kept constant. The optical properties of the AlxGa1-xN layers are studied by photoreflectance and time-resolved photoluminescence (TR-PL) spectroscopies. A degeneration in the material quality of the samples is revealed when the Al content is increased by increasing the TMA flow rate. When the TMG flow rate is decreased with a fixed TMA flow rate, the Al content of the AlxGa1-xN layers is increased and, furthermore, an improvement in the optical properties corresponding with an increase in the PL decay time is observed. (C) 2017 Elsevier B.V. All rights reserved.

Original language	English (US)
Pages (from-to)	2-2
Number of pages	1
Journal	Thin Solid Films
Volume	630
DOIs	https://doi.org/10.1016/j.tsf.2017.02.039
State	Published - Feb 17 2017

ASJC Scopus subject areas

Materials Chemistry
Surfaces and Interfaces
Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films
Metals and Alloys

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10.1016/j.tsf.2017.02.039

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@article{3ffe0421b50d449b9f8f099e025e4132,

title = "Effect of growth conditions on the Al composition and optical properties of Al x Ga 1−x N layers grown by atmospheric-pressure metal organic vapor phase epitaxy",

abstract = "The effect of growth conditions on the Al composition and optical properties of AlxGa1-xN layers grown by atmospheric-pressure metal organic vapor phase epitaxy is investigated. The Al content of the samples is varied between 3.0% and 9.3% by changing the gas flow rate of either trimethylaluminum (TMA) or trimethylgallium (TMG) while other growth parameters are kept constant. The optical properties of the AlxGa1-xN layers are studied by photoreflectance and time-resolved photoluminescence (TR-PL) spectroscopies. A degeneration in the material quality of the samples is revealed when the Al content is increased by increasing the TMA flow rate. When the TMG flow rate is decreased with a fixed TMA flow rate, the Al content of the AlxGa1-xN layers is increased and, furthermore, an improvement in the optical properties corresponding with an increase in the PL decay time is observed. (C) 2017 Elsevier B.V. All rights reserved.",

author = "S. Soltani and M. Bouzidi and Z. Chine and A. Toure and I. Halidou and {El Jani}, B. and Shakfa, {M. K.}",

note = "KAUST Repository Item: Exported on 2019-02-13 Acknowledgements: Financial support from the Tunisian General Directorate of Scientific and Technical Research (DGRST) is gratefully acknowledged. The authors would like to thank Prof. Dr. Martin Koch of the Physics Department of the Philipp University of Marburg for giving the opportunity to perform the time-resolved photoluminescence measurements in his laboratories.",

year = "2017",

month = feb,

day = "17",

doi = "10.1016/j.tsf.2017.02.039",

language = "English (US)",

volume = "630",

pages = "2--2",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Effect of growth conditions on the Al composition and optical properties of Al x Ga 1−x N layers grown by atmospheric-pressure metal organic vapor phase epitaxy

AU - Soltani, S.

AU - Bouzidi, M.

AU - Chine, Z.

AU - Toure, A.

AU - Halidou, I.

AU - El Jani, B.

AU - Shakfa, M. K.

N1 - KAUST Repository Item: Exported on 2019-02-13 Acknowledgements: Financial support from the Tunisian General Directorate of Scientific and Technical Research (DGRST) is gratefully acknowledged. The authors would like to thank Prof. Dr. Martin Koch of the Physics Department of the Philipp University of Marburg for giving the opportunity to perform the time-resolved photoluminescence measurements in his laboratories.

PY - 2017/2/17

Y1 - 2017/2/17

N2 - The effect of growth conditions on the Al composition and optical properties of AlxGa1-xN layers grown by atmospheric-pressure metal organic vapor phase epitaxy is investigated. The Al content of the samples is varied between 3.0% and 9.3% by changing the gas flow rate of either trimethylaluminum (TMA) or trimethylgallium (TMG) while other growth parameters are kept constant. The optical properties of the AlxGa1-xN layers are studied by photoreflectance and time-resolved photoluminescence (TR-PL) spectroscopies. A degeneration in the material quality of the samples is revealed when the Al content is increased by increasing the TMA flow rate. When the TMG flow rate is decreased with a fixed TMA flow rate, the Al content of the AlxGa1-xN layers is increased and, furthermore, an improvement in the optical properties corresponding with an increase in the PL decay time is observed. (C) 2017 Elsevier B.V. All rights reserved.

AB - The effect of growth conditions on the Al composition and optical properties of AlxGa1-xN layers grown by atmospheric-pressure metal organic vapor phase epitaxy is investigated. The Al content of the samples is varied between 3.0% and 9.3% by changing the gas flow rate of either trimethylaluminum (TMA) or trimethylgallium (TMG) while other growth parameters are kept constant. The optical properties of the AlxGa1-xN layers are studied by photoreflectance and time-resolved photoluminescence (TR-PL) spectroscopies. A degeneration in the material quality of the samples is revealed when the Al content is increased by increasing the TMA flow rate. When the TMG flow rate is decreased with a fixed TMA flow rate, the Al content of the AlxGa1-xN layers is increased and, furthermore, an improvement in the optical properties corresponding with an increase in the PL decay time is observed. (C) 2017 Elsevier B.V. All rights reserved.

UR - http://hdl.handle.net/10754/625100

UR - http://www.sciencedirect.com/science/article/pii/S0040609017301281

U2 - 10.1016/j.tsf.2017.02.039

DO - 10.1016/j.tsf.2017.02.039

M3 - Article

SN - 0040-6090

VL - 630

SP - 2

EP - 2

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Effect of growth conditions on the Al composition and optical properties of Al x Ga 1−x N layers grown by atmospheric-pressure metal organic vapor phase epitaxy

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