A suspension spray technique was developed to fabricate dense YSZ electrolyte films on pre-sintered NiO/YSZ anode substrates. The substrates were prepared by tape casting and then pre-sintered at different temperatures. The results indicate that the shrinkage of anode substrates during the pre-sintering treatment and the cosintering process plays a very important role in electrolyte densification and cell distortion. Flat and camber-free YSZ-NiO/YSZ bi-layers were obtained when the pre-sintering temperature was higher than 1200°C; while the electrolyte films were dense when the pre-sintering temperature was lower than 1225°C. The single cell based on the anode pre-sintered at 1200°C outputted a maximum power density of 0.747 Wcm -2 and OCV of 1.00 V at 800°C with humidified hydrogen as fuel and ambient air as oxidant.