Fingerprint
Dive into the research topics of 'Effects of ALD TiN metal gate thickness on metal gate /high-k dielectric SOI FinFET characteristics'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Effects of ALD TiN metal gate thickness on metal gate /high-k dielectric SOI FinFET characteristics
C. Y. Kang, R. Choi, S. C. Song, B. S. Ju, Muhammad Mustafa Hussain, B. H. Lee, J. W. Yang, P. Zeitzoff, D. Pham, W. Xiong, H. H. Tseng
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
10
Scopus
citations