Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes

N. Jaber; M. A.A. Hafiz; S. N.R. Kazmi; M. H. Hasan; F. Alsaleem; S. Ilyas; M. I. Younis

doi:10.1038/s41598-018-36482-1

Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes

N. Jaber, M. A.A. Hafiz, S. N.R. Kazmi, M. H. Hasan, F. Alsaleem, S. Ilyas, M. I. Younis^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.

Original language	English (US)
Article number	319
Journal	Scientific Reports
Volume	9
Issue number	1
DOIs	https://doi.org/10.1038/s41598-018-36482-1
State	Published - Dec 1 2019

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title = "Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes",

abstract = "We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.",

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AU - Hafiz, M. A.A.

AU - Kazmi, S. N.R.

AU - Hasan, M. H.

AU - Alsaleem, F.

AU - Ilyas, S.

AU - Younis, M. I.

PY - 2019/12/1

Y1 - 2019/12/1

N2 - We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.

AB - We demonstrate a simple and flexible technique to efficiently activate micro/nano-electromechanical systems (MEMS/NEMS) resonators at their fundamental and higher order vibration modes. The method is based on the utilization of the amplified voltage across an inductor, L, of an LC tank resonant circuit to actuate the MEMS/NEMS resonator. By matching the electrical and mechanical resonances, significant amplitude amplification is reported across the resonators terminals. We show experimentally amplitude amplification up to twelve times, which is demonstrated to efficiently excite several vibration modes of a microplate MEMS resonator and the fundamental mode of a NEMS resonator.

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Efficient Excitation of Micro/Nano Resonators and Their Higher Order Modes

Abstract

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