Electromagnetically Actuated Surface Micromachined Free Standing Torsion Beam Micromirror Made by Electroplated Nickel

Mauro Prasciolu, Alessandro Carpentiero, Rakesh Kumar^*, Daunt Cojoc, Stafeno Cabrini, Luca Businaro, Filippo Romanato, Enzo Di Fabrizio, Davide Recchia, Gaberiale Parmigiani

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review