Electron-beam lithography of gold nanostructures for surface-enhanced Raman scattering

Weisheng Yue; Zhihong Wang; Yang Yang; Longqing Chen; Ahad A. Syed; Ka Chun Wong; Xianbin Wang

doi:10.1088/0960-1317/22/12/125007

Electron-beam lithography of gold nanostructures for surface-enhanced Raman scattering

Weisheng Yue, Zhihong Wang, Yang Yang, Longqing Chen, Ahad A. Syed, Ka Chun Wong, Xianbin Wang

Research output: Contribution to journal › Article › peer-review

137 Scopus citations

Abstract

The fabrication of nanostructured substrates with precisely controlled geometries and arrangements plays an important role in studies of surface-enhanced Raman scattering (SERS). Here, we present two processes based on electron-beam lithography to fabricate gold nanostructures for SERS. One process involves making use of metal lift-off and the other involves the use of the plasma etching. These two processes allow the successful fabrication of gold nanostructures with various kinds of geometrical shapes and different periodic arrangements. 4-mercaptopyridine (4-MPy) and Rhodamine 6G (R6G) molecules are used to probe SERS signals on the nanostructures. The SERS investigations on the nanostructured substrates demonstrate that the gold nanostructured substrates have resulted in large SERS enhancement, which is highly dependent on the geometrical shapes and arrangements of the gold nanostructures. © 2012 IOP Publishing Ltd.

Original language	English (US)
Pages (from-to)	125007
Journal	Journal of Micromechanics and Microengineering
Volume	22
Issue number	12
DOIs	https://doi.org/10.1088/0960-1317/22/12/125007
State	Published - Oct 26 2012

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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10.1088/0960-1317/22/12/125007

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title = "Electron-beam lithography of gold nanostructures for surface-enhanced Raman scattering",

abstract = "The fabrication of nanostructured substrates with precisely controlled geometries and arrangements plays an important role in studies of surface-enhanced Raman scattering (SERS). Here, we present two processes based on electron-beam lithography to fabricate gold nanostructures for SERS. One process involves making use of metal lift-off and the other involves the use of the plasma etching. These two processes allow the successful fabrication of gold nanostructures with various kinds of geometrical shapes and different periodic arrangements. 4-mercaptopyridine (4-MPy) and Rhodamine 6G (R6G) molecules are used to probe SERS signals on the nanostructures. The SERS investigations on the nanostructured substrates demonstrate that the gold nanostructured substrates have resulted in large SERS enhancement, which is highly dependent on the geometrical shapes and arrangements of the gold nanostructures. {\textcopyright} 2012 IOP Publishing Ltd.",

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T1 - Electron-beam lithography of gold nanostructures for surface-enhanced Raman scattering

AU - Yue, Weisheng

AU - Wang, Zhihong

AU - Yang, Yang

AU - Chen, Longqing

AU - Syed, Ahad A.

AU - Wong, Ka Chun

AU - Wang, Xianbin

N1 - KAUST Repository Item: Exported on 2020-10-01

PY - 2012/10/26

Y1 - 2012/10/26

N2 - The fabrication of nanostructured substrates with precisely controlled geometries and arrangements plays an important role in studies of surface-enhanced Raman scattering (SERS). Here, we present two processes based on electron-beam lithography to fabricate gold nanostructures for SERS. One process involves making use of metal lift-off and the other involves the use of the plasma etching. These two processes allow the successful fabrication of gold nanostructures with various kinds of geometrical shapes and different periodic arrangements. 4-mercaptopyridine (4-MPy) and Rhodamine 6G (R6G) molecules are used to probe SERS signals on the nanostructures. The SERS investigations on the nanostructured substrates demonstrate that the gold nanostructured substrates have resulted in large SERS enhancement, which is highly dependent on the geometrical shapes and arrangements of the gold nanostructures. © 2012 IOP Publishing Ltd.

AB - The fabrication of nanostructured substrates with precisely controlled geometries and arrangements plays an important role in studies of surface-enhanced Raman scattering (SERS). Here, we present two processes based on electron-beam lithography to fabricate gold nanostructures for SERS. One process involves making use of metal lift-off and the other involves the use of the plasma etching. These two processes allow the successful fabrication of gold nanostructures with various kinds of geometrical shapes and different periodic arrangements. 4-mercaptopyridine (4-MPy) and Rhodamine 6G (R6G) molecules are used to probe SERS signals on the nanostructures. The SERS investigations on the nanostructured substrates demonstrate that the gold nanostructured substrates have resulted in large SERS enhancement, which is highly dependent on the geometrical shapes and arrangements of the gold nanostructures. © 2012 IOP Publishing Ltd.

UR - http://hdl.handle.net/10754/562376

UR - https://iopscience.iop.org/article/10.1088/0960-1317/22/12/125007

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DO - 10.1088/0960-1317/22/12/125007

M3 - Article

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VL - 22

SP - 125007

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 12

ER -

Electron-beam lithography of gold nanostructures for surface-enhanced Raman scattering

Abstract

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