Electrostatically actuated torsional resonant sensors and switches

Keyphrases

• AC Voltage Source 50%
• Beam Structure 100%
• DC Voltage Source 50%
• Electrical Harmonics 50%
• Electrostatic Actuation 50%
• Electrostatically Actuated 100%
• Harmonic Load 50%
• Resonant Structure 50%
• Resonant Switch 100%
• Selective Materials 50%

Engineering

• Beam Structure 100%
• Electrostatic Actuation 50%
• Harmonics 50%
• Resonant Sensor 100%
• Resonant Structure 50%
• Voltage Source 50%