Abstract
We report a MEMS-based spatial light modulator which consists of an electrothermally actuated varifocal metasurface. The focal length can be tuned over a range of 40 µm with less than 10 V. The lens exhibits a high compactness and simplicity of fabrication.
Original language | English (US) |
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Title of host publication | CLEO: Science and Innovations, S and I 2022 |
Publisher | Optica Publishing Group (formerly OSA) |
ISBN (Print) | 9781557528209 |
State | Published - Jan 1 2022 |