Electrothermal 1D Varifocal Metalens

Quentin A.A. Tanguy, Hussein Hussein, Shane Colburn, Luocheng Huang, Karl F. Böhringer, Arka Majumdar

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report a MEMS-based spatial light modulator which consists of an electrothermally actuated varifocal metasurface. The focal length can be tuned over a range of 40 µm with less than 10 V. The lens exhibits a high compactness and simplicity of fabrication.
Original languageEnglish (US)
Title of host publicationCLEO: Science and Innovations, S and I 2022
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781557528209
StatePublished - Jan 1 2022

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