Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction
Suey Li Toh*, K. Li, C. H. Ang, R. Rao, E. Er, K. P. Loh, C. B. Boothroyd, L. Chan
*Corresponding author for this work
Research output: Contribution to conference › Paper › peer-review
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