Evaluation of the strain state in SiGe/Si heterostructures by high resolution X-ray diffraction and convergent beam electron diffraction

Suey Li Toh*, K. Li, C. H. Ang, R. Rao, E. Er, K. P. Loh, C. B. Boothroyd, L. Chan

*Corresponding author for this work

Research output: Contribution to conferencePaperpeer-review

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Material Science

Physics