@inproceedings{07083da1b76446809ef1cfbdc8170737,
title = "Experimental investigation of 2:1 and 3:1 internal resonances in MEMS arch resonators",
abstract = "We demonstrate experimentally internal resonances in MEMS resonators. The investigation is conducted on in-plane MEMS arch resonators fabricated with a highly doped silicon. The resonators are actuated electrostatically and their stiffness are tuned by electrothermal loading by passing an electrical current though the microstructures. We show that through this tuning, the ratio of the various resonance frequencies can be varied and set at certain ratios. Particularly, we adjust the resonance frequencies of two different vibrational modes to 2:1 and 3:1. Finally, we validate the internal resonances at these ratios through frequency-response curves and FFTs.",
keywords = "Internal resonance, MEMS, Nonlinear dynamics, Shallow arch",
author = "Abdallah Ramini and Amal Hajjaj and Younis, {Mohammad I.}",
note = "Publisher Copyright: Copyright � 2016 by ASME.; ASME 2016 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE 2016 ; Conference date: 21-08-2016 Through 24-08-2016",
year = "2016",
doi = "10.1115/DETC201659538",
language = "English (US)",
series = "Proceedings of the ASME Design Engineering Technical Conference",
publisher = "The American Society of Mechanical Engineers(ASME)",
booktitle = "12th International Conference on Multibody Systems, Nonlinear Dynamics, and Control",
address = "United States",
}