EXPLOITING NONLINEAR BAHAVIOR OF MEMS RESONATORS FOR FILTER APPLICATIONS

Saad Ilyas; Mohammad I. Younis

doi:10.1115/DETC2017-67863

EXPLOITING NONLINEAR BAHAVIOR OF MEMS RESONATORS FOR FILTER APPLICATIONS

Saad Ilyas, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter’s pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.

Original language	English (US)
Title of host publication	Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems
Publisher	American Society of Mechanical Engineers
ISBN (Print)	9780791858165
DOIs	https://doi.org/10.1115/DETC2017-67863
State	Published - 2017

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10.1115/DETC2017-67863

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@inproceedings{233d3aa3d6a74bbb8308d5ffb8707746,

title = "EXPLOITING NONLINEAR BAHAVIOR OF MEMS RESONATORS FOR FILTER APPLICATIONS",

abstract = "We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter{\textquoteright}s pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.",

author = "Saad Ilyas and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2021-08-21 Acknowledgements: This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.",

year = "2017",

doi = "10.1115/DETC2017-67863",

language = "English (US)",

isbn = "9780791858165",

booktitle = "Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems",

publisher = "American Society of Mechanical Engineers",

}

EXPLOITING NONLINEAR BAHAVIOR OF MEMS RESONATORS FOR FILTER APPLICATIONS. / Ilyas, Saad; Younis, Mohammad I.
Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers, 2017.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - EXPLOITING NONLINEAR BAHAVIOR OF MEMS RESONATORS FOR FILTER APPLICATIONS

AU - Ilyas, Saad

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2021-08-21 Acknowledgements: This work has been supported through King Abdullah University of Science and Technology (KAUST) research funds.

PY - 2017

Y1 - 2017

N2 - We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter’s pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.

AB - We propose combining the hardening and softening nonlinearities of two resonators to realize a near flat pass band filter of almost zero roll-off. The device is composed of two near identical doubly clamped and laterally actuated microbeams made of Silicon. One of the resonators is buckled via thermal loading to produce softening resonance peak. It is then further tuned to create the desired overlap with the hardening resonance peak of the other resonator. This overlapping improves the filter’s pass band flatness and roll-off characteristics, which are highly desirable. This technique can be promising for future generation of filters with superior characteristics.

UR - http://hdl.handle.net/10754/670693

UR - https://asmedigitalcollection.asme.org/IDETC-CIE/proceedings/IDETC-CIE2017/58165/Cleveland,%20Ohio,%20USA/256749

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U2 - 10.1115/DETC2017-67863

DO - 10.1115/DETC2017-67863

M3 - Conference contribution

AN - SCOPUS:85034749661

SN - 9780791858165

BT - Volume 4: 22nd Design for Manufacturing and the Life Cycle Conference; 11th International Conference on Micro- and Nanosystems

PB - American Society of Mechanical Engineers

ER -

EXPLOITING NONLINEAR BAHAVIOR OF MEMS RESONATORS FOR FILTER APPLICATIONS

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