@inproceedings{ba296a7a4f9d436c980756cf10c57319,
title = "Fabrication of nanostructures using electron beam interference technique-a proposal",
abstract = "The fabrication and investigation of low dimensional semiconductor nanostructures have received increasing attention in recent years. The quasi one- and zero-dimensional structures have shown improved optical and electrical properties that increase device performance and enable development of novel devices. Many technological approaches have been developed to define ultrasmall semiconductor structures as in quantum wire and quantum dot fabrication. In this paper, a method based on electron beam interference, for nanostructures fabrication is proposed. Nanoscale wires or gratings, as well as dots, are generated using this method which is simple, maskless and of high throughput.",
author = "O. Gunawan and Ng, {S. L.} and Ooi, {C. H.} and Ooi, {B. S.} and Lam, {Y. L.} and Chan, {Y. C.}",
note = "Publisher Copyright: {\textcopyright} 1999 IEEE.; 1999 Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 1999 ; Conference date: 30-08-1999 Through 03-09-1999",
year = "1999",
doi = "10.1109/CLEOPR.1999.811430",
language = "English (US)",
series = "CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "314--315",
booktitle = "CLEO/Pacific Rim 1999 - Pacific Rim Conference on Lasers and Electro-Optics",
address = "United States",
}