Abstract
We explore a micro-pump strategy for injecting perovskite materials into Si micro-channels, allowing fabrication of many perovskite micro-wires (MWs) to form inside the regularly-spaced (periodic) Si micro-grooves (~ 1000 MWs/mm). Mask-free laser interference lithography is used to produce periodic Si micro-channels. The SiO2 layer is deposited on the Si array before pumping perovskite to enhance the device performance. We demonstrate a cost-effective zero-waste fabrication method of highly responsive photodetectors based on uniform perovskite MWs/SiO2/Si periodic arrays.
Original language | English (US) |
---|---|
Title of host publication | 2021 IEEE 17th International Conference on Group IV Photonics (GFP) |
Publisher | IEEE |
ISBN (Print) | 978-1-6654-4675-4 |
DOIs | |
State | Published - Jan 18 2022 |