TY - JOUR
T1 - Fabrication of relaxer-based piezoelectric energy harvesters using a sacrificial poly-Si seeding layer
AU - Fuentes-Fernandez, E. M A
AU - Salomon-Preciado, A. M.
AU - Gnade, Bruce E.
AU - Quevedo-López, Manuel Angel Quevedo
AU - Shah, Pradeep
AU - Alshareef, Husam N.
N1 - KAUST Repository Item: Exported on 2020-10-01
Acknowledgements: The authors would like to thank the National Science Foundation for the Phase I STTR #0810391 and Phase IB #0937831 grants supplemented by the Texas Emerging Technology Fund seed grant (March 2008-Sept 2009). The research reported here was also supported by King Abdullah University of Science and Technology.
PY - 2014/8/7
Y1 - 2014/8/7
N2 - The effect of a polycrystalline silicon (poly-Si) seeding layer on the properties of relaxor Pb(Zr0.53,Ti0.47)O3-Pb(Zn1/3,Nb2/3)O3 (PZT-PZN) thin films and energy-harvesting cantilevers was studied. We deposited thin films of the relaxor on two substrates, with and without a poly-Si seeding layer. The seeding layer, which also served as a sacrificial layer to facilitate cantilever release, was found to improve morphology, phase purity, crystal orientation, and electrical properties. We attributed these results to reduction of the number of nucleation sites and, therefore, to an increase in relaxor film grain size. The areal power density of the wet-based released harvester was measured. The power density output of the energy harvester with this relaxor composition and the poly-Si seeding layer was 325 μW/cm2.
AB - The effect of a polycrystalline silicon (poly-Si) seeding layer on the properties of relaxor Pb(Zr0.53,Ti0.47)O3-Pb(Zn1/3,Nb2/3)O3 (PZT-PZN) thin films and energy-harvesting cantilevers was studied. We deposited thin films of the relaxor on two substrates, with and without a poly-Si seeding layer. The seeding layer, which also served as a sacrificial layer to facilitate cantilever release, was found to improve morphology, phase purity, crystal orientation, and electrical properties. We attributed these results to reduction of the number of nucleation sites and, therefore, to an increase in relaxor film grain size. The areal power density of the wet-based released harvester was measured. The power density output of the energy harvester with this relaxor composition and the poly-Si seeding layer was 325 μW/cm2.
UR - http://hdl.handle.net/10754/563694
UR - http://link.springer.com/10.1007/s11664-014-3308-x
UR - http://www.scopus.com/inward/record.url?scp=84907711514&partnerID=8YFLogxK
U2 - 10.1007/s11664-014-3308-x
DO - 10.1007/s11664-014-3308-x
M3 - Article
SN - 0361-5235
VL - 43
SP - 3898
EP - 3904
JO - Journal of Electronic Materials
JF - Journal of Electronic Materials
IS - 11
ER -