TY - GEN
T1 - Fabrication of SU-8 low frequency electrostatic energy harvester
AU - Ramadan, Khaled S.
AU - Foulds, Ian G.
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2011/11
Y1 - 2011/11
N2 - A 1500μm × 1500μm × 150μm out-of-plane, gap closing, electrostatic energy harvester is designed and fabricated to harvest low-frequency ambient vibrations. SU-8 is used to fabricate the proof mass (1200μm × 1200μm × 150μm) and the 5 m springs. Different harvesters were designed to harvest at 50, 75 and 110 Hz. At 110 Hz, Simulations show that with an input vibration of 10 μm amplitude at the frequency of resonance of the structure, the energy harvester should generate an average output power density of 0.032μW/mm3. This is the most area-efficient low-frequency electrostatic harvester to-date. © 2011 IEEE.
AB - A 1500μm × 1500μm × 150μm out-of-plane, gap closing, electrostatic energy harvester is designed and fabricated to harvest low-frequency ambient vibrations. SU-8 is used to fabricate the proof mass (1200μm × 1200μm × 150μm) and the 5 m springs. Different harvesters were designed to harvest at 50, 75 and 110 Hz. At 110 Hz, Simulations show that with an input vibration of 10 μm amplitude at the frequency of resonance of the structure, the energy harvester should generate an average output power density of 0.032μW/mm3. This is the most area-efficient low-frequency electrostatic harvester to-date. © 2011 IEEE.
UR - http://hdl.handle.net/10754/561913
UR - http://ieeexplore.ieee.org/document/6136689/
UR - http://www.scopus.com/inward/record.url?scp=84856846464&partnerID=8YFLogxK
U2 - 10.1109/ICEAC.2011.6136689
DO - 10.1109/ICEAC.2011.6136689
M3 - Conference contribution
SN - 9781467304658
BT - 2011 International Conference on Energy Aware Computing
PB - Institute of Electrical and Electronics Engineers (IEEE)
ER -