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Fabrication of ultra-thin strained silicon on insulator
T. S. Drake*, C. Ní Chléirigh, M. L. Lee, A. J. Pitera, E. A. Fitzgerald, D. A. Antoniadis, D. H. Anjum, J. Li, R. Hull, N. Klymko, J. L. Hoyt
*Corresponding author for this work
Research output: Contribution to journal › Article › peer-review
34
Scopus
citations