Fabrication of ultrahigh density metal-cell-metal crossbar memory devices with only two cycles of lithography and dry-etch procedures

Baoyu Zong, J. Y. Goh, Zaibing Guo, Ping Luo, Chenchen Wang, Jinjun Qiu, Pin Ho, Yunjie Chen, Mingsheng Zhang, Guchang Han

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Fingerprint

Dive into the research topics of 'Fabrication of ultrahigh density metal-cell-metal crossbar memory devices with only two cycles of lithography and dry-etch procedures'. Together they form a unique fingerprint.

Material Science

Keyphrases