Fast collisional capillary discharge source for soft x-ray production and applications

G. Tomassetti; L. Palladino; A. Ritucci; L. Reale; T. Limongi; S. V. Kukhlevsky; J. Kaiser; F. Flora; L. Mezi

doi:10.1117/12.448460

Fast collisional capillary discharge source for soft x-ray production and applications

G. Tomassetti, L. Palladino, A. Ritucci, L. Reale, T. Limongi, S. V. Kukhlevsky, J. Kaiser, F. Flora, L. Mezi

Research output: Contribution to journal › Article › peer-review

Abstract

We report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO₂, as plasma medium, after the optimization of the discharge setup and electrical parameters.

Original language	English (US)
Pages (from-to)	151-158
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4504
DOIs	https://doi.org/10.1117/12.448460
State	Published - 2001
Externally published	Yes

Keywords

Capillary z-pinch discharges
Soft x-ray sources

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.448460

Cite this

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title = "Fast collisional capillary discharge source for soft x-ray production and applications",

abstract = "We report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters.",

keywords = "Capillary z-pinch discharges, Soft x-ray sources",

author = "G. Tomassetti and L. Palladino and A. Ritucci and L. Reale and T. Limongi and Kukhlevsky, {S. V.} and J. Kaiser and F. Flora and L. Mezi",

year = "2001",

doi = "10.1117/12.448460",

language = "English (US)",

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pages = "151--158",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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TY - JOUR

T1 - Fast collisional capillary discharge source for soft x-ray production and applications

AU - Tomassetti, G.

AU - Palladino, L.

AU - Ritucci, A.

AU - Reale, L.

AU - Limongi, T.

AU - Kukhlevsky, S. V.

AU - Kaiser, J.

AU - Flora, F.

AU - Mezi, L.

PY - 2001

Y1 - 2001

N2 - We report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters.

AB - We report on a fast soft x-ray source consisting in a high temperature small diameter (4 mm) plasma column produced by electric discharge in a ceramic capillary. This source was developed to produce pulses of few hundred nanosecond duration for EUV lithography, x ray microscopy applications and also with the aim of developing a soft x ray amplifier. We obtained experimental results concerning the intensity and spectral analysis of the emitted x radiation pumped by a 30-40 kA, 100-200 ns, electric discharge at 1 Torr pressure in Ar gas. We refer also on the spectra obtained using CO2, as plasma medium, after the optimization of the discharge setup and electrical parameters.

KW - Capillary z-pinch discharges

KW - Soft x-ray sources

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U2 - 10.1117/12.448460

DO - 10.1117/12.448460

M3 - Article

AN - SCOPUS:0035764882

SN - 0277-786X

VL - 4504

SP - 151

EP - 158

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Fast collisional capillary discharge source for soft x-ray production and applications

Abstract

Keywords

ASJC Scopus subject areas

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