Flat metallic surface with sub-10-nm gaps using modified atomic-layer lithography

Dengxin Ji, Borui Chen, Xie Zeng, Tania Moein, Haomin Song, Qiaoqiang Gan, Alexander Cartwright

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Flat metallic surface with sub-10-nm gaps using modified atomic-layer lithography'. Together they form a unique fingerprint.

Keyphrases

Engineering