Flexible high-κ/Metal gate metal/insulator/metal capacitors on silicon (100) fabric

Engineering

• Metal Gate 100%
• Metal-Insulator-Metal 100%
• Microfabrication 50%
• Bending Radius 50%
• Nominal Strain 50%
• Applied Strain 50%
• Reliability Study 50%
• Mechanical Stress 50%
• Dynamic Random Access Memory 50%

Keyphrases

• Reliability Study 50%
• Silicon Area 50%
• Mechanical Robustness 50%
• Bendable Substrate 50%
• Area 18 50%
• Computational System 50%
• Dynamic Random Access Memory 50%
• Lifetime Projection 50%

Material Science

• Capacitor 100%
• Microfabrication 50%
• Thin Sheet 50%
• Mechanical Stress 50%