Flip-chip blue LEDs grown on (20(2)over-bar1) bulk GaN substrates utilizing photoelectrochemical etching for substrate removal

Benjamin P. Yonkee, Burhan SaifAddin, John T. Leonard, Steven P. DenBaars, Shuji Nakamura

Research output: Contribution to journalArticlepeer-review

11 Scopus citations

Abstract

We demonstrate a 440nm emitting flip-chip GaN LED utilizing photoelectrochemical (PEC) etching for substrate removal. The device was flip-chipbonded to a thermally conductive silicon carbide substrate, which allowed for CW operation at current densities up to 200A/cm2 with minimal thermal droop. The PEC etch provided a damage-free method of removing substrates and could allow for substrate reuse. The epitaxially defined etch also exposed a highly doped n-contact layer, which contributed to the low operating voltage of 3.74V at 400A/cm2 and a peak wall plug efficiency (WPE) of 7%.
Original languageEnglish (US)
Pages (from-to)056502
JournalAPPLIED PHYSICS EXPRESS
Volume9
Issue number5
DOIs
StatePublished - Apr 20 2016
Externally publishedYes

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