Fully inkjet printed RF inductors and capacitors using polymer dielectric and silver conductive ink with through vias

Garret McKerricher, Jose Gonzalez Perez, Atif Shamim

Research output: Contribution to journalArticlepeer-review

70 Scopus citations

Abstract

In this paper, fully inkjet printed multilayer capacitors and inductors are fabricated and characterized using poly 4-vinylphenol (PVP) ink as the dielectric layer and silver nanoparticle ink as the conductor. Inkjet printed through vias, created with a novel dissolving method are used to make RF structures in a multilayer inkjet printing process. The vias have been realized in a 350-nm PVP film and exhibit resistance better than 0.1 Ω. Spiral inductors from 10 to 75 nH have been realized with maximum quality factors around five. The 10-nH inductor exhibits a self-resonant frequency slightly below 1 GHz. Metal-insulator-metal capacitors are realized with densities of 50 pF/mm-2. These capacitors demonstrate values ranging from 16 to 50 pF. The 16-pF capacitor shows a self-resonant frequency over 1.5 GHz. The successful implementation of inductors and capacitors in an all inkjet printed multilayer process with vias is an important step toward fully inkjet-printed large area and flexible RF systems.
Original languageEnglish (US)
Pages (from-to)1002-1009
Number of pages8
JournalIEEE Transactions on Electron Devices
Volume62
Issue number3
DOIs
StatePublished - Mar 2015

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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