Abstract
The ~25nm thick threading dislocation free GaN nanomembrane was prepared using ultraviolet electroless chemical etching method offering the possibility of flexible integration of (Al,In,Ga)N optoelectronic and electronic devices.
Original language | English (US) |
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Title of host publication | Asia Communications and Photonics Conference 2014 |
Publisher | The Optical Society |
ISBN (Print) | 9781557528520 |
DOIs | |
State | Published - 2014 |