TY - JOUR
T1 - Gas sensitivity amplification of interdigitated chemocapacitors through etching
AU - Oikonomou, P.
AU - Botsialas, A.
AU - Papanikolaou, N.
AU - Kazas, I.
AU - Ntetsikas, Konstantinos
AU - Polymeropoulos, Georgios
AU - Hadjichristidis, Nikos
AU - Sanopoulou, M.
AU - Raptis, I.
N1 - KAUST Repository Item: Exported on 2020-10-01
PY - 2019/9/2
Y1 - 2019/9/2
N2 - In polymer coated planar Inter Digitated Electrodes (IDEs), the gas sensing sensitivity is much lower than the sensitivity of parallel plate capacitors. Here, we introduce a simple patterning step for the modification of the geometry of the dielectric substrate of the planar IDEs, and increase of the contribution of the sensitive layer to the output signal. The proposed methodology is investigated through simulation and verified by experimental data. Polymer coated IDEs with different dimensions of spatial wavelength were studied experimentally upon exposure to analytes of varying polarity. The sensing performance of the fabricated structures compare very well with theoretically estimated values obtained through finite element simulations. The maximum performance gain is also calculated by simulation demonstrating the potential of the technology.
AB - In polymer coated planar Inter Digitated Electrodes (IDEs), the gas sensing sensitivity is much lower than the sensitivity of parallel plate capacitors. Here, we introduce a simple patterning step for the modification of the geometry of the dielectric substrate of the planar IDEs, and increase of the contribution of the sensitive layer to the output signal. The proposed methodology is investigated through simulation and verified by experimental data. Polymer coated IDEs with different dimensions of spatial wavelength were studied experimentally upon exposure to analytes of varying polarity. The sensing performance of the fabricated structures compare very well with theoretically estimated values obtained through finite element simulations. The maximum performance gain is also calculated by simulation demonstrating the potential of the technology.
UR - http://hdl.handle.net/10754/656695
UR - https://ieeexplore.ieee.org/document/8822731/
UR - http://www.scopus.com/inward/record.url?scp=85077821243&partnerID=8YFLogxK
U2 - 10.1109/jsen.2019.2939016
DO - 10.1109/jsen.2019.2939016
M3 - Article
SN - 1530-437X
VL - 20
SP - 463
EP - 470
JO - IEEE Sensors Journal
JF - IEEE Sensors Journal
IS - 1
ER -