Green synthesis of CuxO nanoscale MOS capacitors processed at low temperatures

Safeyah Al-Shehri, Norah Al-Senany, Reem Altuwirqi, Amani Bayahya, Fwzah Hamud Alshammari, Zhenwei Wang, Hala Al-Jawhari

Research output: Contribution to journalArticlepeer-review

4 Scopus citations


In this work, we employed two nontoxic green chemistry methods to develop solution-processed copper oxide CuxO thin films at low annealing temperature of 200 °C. The first aqueous precursor of CuxO was prepared by mixing the copper powder with spinach leaves extract, whereas the other solution was formulated using the water-based polyol reduction method of Cu(II) nitrate. The as-prepared precursors were then spun on SiO2/P+ Si substrates to form nanoscale Metal-Oxide-Semiconductor (MOS) capacitors by which some valuable information about the CuxO semiconductor films and their interfaces with dielectric were acquired. Both fabricated MOS capacitors exhibited p-type polarity with negative flat-band voltages. However, the MOS based on spinach extract-CuxO films showed small hysteresis of 100 mV, which could be attributed to its large grain size that sequentially leads to smooth interface and less trap density.
Original languageEnglish (US)
Pages (from-to)246-251
Number of pages6
JournalSurface and Coatings Technology
StatePublished - Jan 10 2017


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