Growth mechanism of TiN film on dielectric films and the effects on the work function

K. Choi^*, P. Lysaght, H. Alshareef, C. Huffman, H. C. Wen, R. Harris, H. Luan, P. Y. Hung, C. Sparks, Melvin Cruz, K. Matthews, P. Majhi, B. H. Lee

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review