HCl Flow-Induced Phase Change of α-, β-, and ε-Ga2O3 Films Grown by MOCVD

Haiding Sun, Kuang-Hui Li, C. G. Torres Castanedo, Serdal Okur, Gary S. Tompa, Tom Salagaj, Sergei Lopatin, Alessandro Genovese, Xiaohang Li

Research output: Contribution to journal › Article › peer-review

160 Scopus citations

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