High Performance Micro Resonators-based Sensors using Multi-Mode Excitation

Wen Zhao, Fahimullah Khan, Nouha Alcheikh, Mohammad I. Younis

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


We present a multi-mode excitation technique to significantly amplify the amplitude signal of micro-resonators-based sensors operating at their higher-order modes. We show that the multi-mode excitation can significantly reduce the noise effects, elevate the dynamic response level, and amplify the total amplitude response. We demonstrate the efficiency of the multi-mode excitation to enhance the performance of a gas sensor using electrothermally heated doubly-clamped buckled beams. The results indicate clear amplification for the response at the 2nd mode while detecting Helium compared to a single-source excitation. A 24-times amplitude magnification is achieved. The demonstrated approach provides a promising path to efficiently exploit the higher-order modes of resonant gas sensors leading to improved accuracy and resolution.
Original languageEnglish (US)
Pages (from-to)1-1
Number of pages1
JournalIEEE Electron Device Letters
StatePublished - Aug 4 2022

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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