High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography

L. Businaro; F. Romanato; P. Candeloro; E. Di Fabrizio; M. Patrini; M. Galli; C. Andreani; A. Passaseo; M. De Vittorio

doi:10.1116/1.1547726

High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography

L. Businaro^*, F. Romanato, P. Candeloro, E. Di Fabrizio, M. Patrini, M. Galli, C. Andreani, A. Passaseo, M. De Vittorio

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Original language	English (US)
Pages (from-to)	748-753
Number of pages	6
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	2
DOIs	https://doi.org/10.1116/1.1547726
State	Published - 2003
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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Businaro, L., Romanato, F., Candeloro, P., Di Fabrizio, E., Patrini, M., Galli, M., Andreani, C., Passaseo, A., & De Vittorio, M. (2003). High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21(2), 748-753. https://doi.org/10.1116/1.1547726

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title = "High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography",

author = "L. Businaro and F. Romanato and P. Candeloro and {Di Fabrizio}, E. and M. Patrini and M. Galli and C. Andreani and A. Passaseo and {De Vittorio}, M.",

year = "2003",

doi = "10.1116/1.1547726",

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Businaro, L, Romanato, F, Candeloro, P, Di Fabrizio, E, Patrini, M, Galli, M, Andreani, C, Passaseo, A & De Vittorio, M 2003, 'High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography', Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, vol. 21, no. 2, pp. 748-753. https://doi.org/10.1116/1.1547726

TY - JOUR

T1 - High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography

AU - Businaro, L.

AU - Romanato, F.

AU - Candeloro, P.

AU - Di Fabrizio, E.

AU - Patrini, M.

AU - Galli, M.

AU - Andreani, C.

AU - Passaseo, A.

AU - De Vittorio, M.

PY - 2003

Y1 - 2003

UR - http://www.scopus.com/inward/record.url?scp=0037273929&partnerID=8YFLogxK

U2 - 10.1116/1.1547726

DO - 10.1116/1.1547726

M3 - Article

AN - SCOPUS:0037273929

SN - 1071-1023

VL - 21

SP - 748

EP - 753

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 2

ER -

High-resolution complex structures for two-dimensional photonic crystals realized by x-ray diffraction lithography

ASJC Scopus subject areas

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