High resolution x-ray diffraction study of the substrate temperature and thickness dependent microstructure of reactively sputtered epitaxial ZnO films

Material Science

• Epilayers 100%
• ZnO 100%
• Edge Dislocation 50%
• Density 50%
• Screw Dislocation 50%
• Epitaxy 25%
• Diffraction Measurement 25%
• Sapphire 25%
• High Resolution X-Ray Diffraction 25%
• Platelet 25%
• Crystallite 25%

Keyphrases

• Microstructural Parameters 100%
• Transition Shift 33%
• 2D Layer 33%
• Thick Epilayer 33%
• Low Substrate Temperature 33%
• Hillocks 33%
• Zinc Target 33%
• Vertical Coherence 33%