Engineering
Ultraviolet Light
100%
Metasurface
100%
Dielectrics
100%
Vortex
100%
High Resolution
28%
Conventional Method
14%
System-on-Chip
14%
Nitride
14%
Optical Lithography
14%
Single Device
14%
High Photon Energy
14%
Demonstrates
14%
Ring Radius
14%
Realization
14%
Numerical Aperture
14%
Physics
Dielectrics
100%
Metasurface
100%
High Resolution
28%
Optical Communication
28%
Nanophotonics
14%
Optical Device
14%
Visible Spectrum
14%
Electromagnetic Wave
14%
Electromagnetic Radiation
14%
Silicon Nitride
14%
Energy Gaps (Solid State)
14%
Numerical Aperture
14%
Photolithography
14%
Ultraviolet Spectra
14%
Information Processing
14%
Material Science
Dielectric Material
100%
Silicon Nitride
100%
Vortex
100%
Optical Device
25%
Optical Lithography
25%
High Resolution Spectroscopy
25%
Keyphrases
Diffracted Light
20%
Integrated Nanophotonics
20%