INIS
range
100%
sensors
100%
beams
40%
resonance
40%
variations
20%
finite element method
20%
performance
20%
simulation
20%
values
20%
sensitivity
20%
size
20%
increasing
20%
thickness
20%
experimental data
20%
vibration modes
20%
Engineering
Pressure Probe
100%
Resonance Frequency
66%
Finite Element Method
33%
Torr
33%
Data Show
33%
Vibration Mode
33%
Mode of Vibration
33%
Actuation Load
33%
Thickness
33%
Performance
33%
Simulation
33%
Physics
Pressure
100%
Frequencies
33%
Vibration
22%
Microbeam
22%
Increasing
11%
Performance
11%
Simulation
11%
Independent Variables
11%
Variations
11%
Value
11%
Vacuum
11%
Material Science
Sensor
100%
Microsensor
66%
Finite Element Methods
33%