Highly Sensitive Resonant Bi-Directional Magnetic Field Micro-Sensor∗∗Research supported by KAUST Foundation.

Nouha Alcheikh; Sofiane Ben Mbarek; Mohammad I. Younis

doi:10.1109/NEMS51815.2021.9451354

Highly Sensitive Resonant Bi-Directional Magnetic Field Micro-Sensor∗∗Research supported by KAUST Foundation.

Nouha Alcheikh, Sofiane Ben Mbarek, Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper demonstrates a micro-machined ultra-sensitive bi-directional magnetic sensor based on the Lorentz-force principle. The magnetometer relies on detecting the resonant frequency of electrothermally actuated straight micro-resonator operated near the buckling point. Optical sensing is utilized to capture the frequency shift while the device is operated at ambient pressure and temperature. The micro-sensor shows a high normalized sensitivity (S) of 9.48 (mA.T)-1 compared to the literature and good linearity of 0.12% in wide range of magnetic field. Also the sensor consumes low power around 0.2 mW. These features encourage for low cost applications.

Original language	English (US)
Title of host publication	2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Publisher	IEEE
Pages	425-428
Number of pages	4
ISBN (Print)	9781665419413
DOIs	https://doi.org/10.1109/NEMS51815.2021.9451354
State	Published - Apr 25 2021

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10.1109/NEMS51815.2021.9451354

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@inproceedings{1a93b7d6264444389f93c5dd75f2bdfa,

title = "Highly Sensitive Resonant Bi-Directional Magnetic Field Micro-Sensor∗∗Research supported by KAUST Foundation.",

abstract = "This paper demonstrates a micro-machined ultra-sensitive bi-directional magnetic sensor based on the Lorentz-force principle. The magnetometer relies on detecting the resonant frequency of electrothermally actuated straight micro-resonator operated near the buckling point. Optical sensing is utilized to capture the frequency shift while the device is operated at ambient pressure and temperature. The micro-sensor shows a high normalized sensitivity (S) of 9.48 (mA.T)-1 compared to the literature and good linearity of 0.12% in wide range of magnetic field. Also the sensor consumes low power around 0.2 mW. These features encourage for low cost applications.",

author = "Nouha Alcheikh and {Ben Mbarek}, Sofiane and Younis, {Mohammad I.}",

note = "KAUST Repository Item: Exported on 2021-09-02 Acknowledgements: We acknowledge financial support from King Abdullah University of Science and Technology.",

year = "2021",

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doi = "10.1109/NEMS51815.2021.9451354",

language = "English (US)",

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Highly Sensitive Resonant Bi-Directional Magnetic Field Micro-Sensor∗∗Research supported by KAUST Foundation. / Alcheikh, Nouha; Ben Mbarek, Sofiane; Younis, Mohammad I.
2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS). IEEE, 2021. p. 425-428.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Highly Sensitive Resonant Bi-Directional Magnetic Field Micro-Sensor∗∗Research supported by KAUST Foundation.

AU - Alcheikh, Nouha

AU - Ben Mbarek, Sofiane

AU - Younis, Mohammad I.

N1 - KAUST Repository Item: Exported on 2021-09-02 Acknowledgements: We acknowledge financial support from King Abdullah University of Science and Technology.

PY - 2021/4/25

Y1 - 2021/4/25

N2 - This paper demonstrates a micro-machined ultra-sensitive bi-directional magnetic sensor based on the Lorentz-force principle. The magnetometer relies on detecting the resonant frequency of electrothermally actuated straight micro-resonator operated near the buckling point. Optical sensing is utilized to capture the frequency shift while the device is operated at ambient pressure and temperature. The micro-sensor shows a high normalized sensitivity (S) of 9.48 (mA.T)-1 compared to the literature and good linearity of 0.12% in wide range of magnetic field. Also the sensor consumes low power around 0.2 mW. These features encourage for low cost applications.

AB - This paper demonstrates a micro-machined ultra-sensitive bi-directional magnetic sensor based on the Lorentz-force principle. The magnetometer relies on detecting the resonant frequency of electrothermally actuated straight micro-resonator operated near the buckling point. Optical sensing is utilized to capture the frequency shift while the device is operated at ambient pressure and temperature. The micro-sensor shows a high normalized sensitivity (S) of 9.48 (mA.T)-1 compared to the literature and good linearity of 0.12% in wide range of magnetic field. Also the sensor consumes low power around 0.2 mW. These features encourage for low cost applications.

UR - http://hdl.handle.net/10754/670871

UR - https://ieeexplore.ieee.org/document/9451354/

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U2 - 10.1109/NEMS51815.2021.9451354

DO - 10.1109/NEMS51815.2021.9451354

M3 - Conference contribution

SN - 9781665419413

SP - 425

EP - 428

BT - 2021 IEEE 16th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)

PB - IEEE

ER -

Highly Sensitive Resonant Bi-Directional Magnetic Field Micro-Sensor∗∗Research supported by KAUST Foundation.

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