Highly tunable NEMS shallow arches

Engineering

• Shallower 100%
• Conductive 33%
• Experimental Result 33%
• Good Agreement 33%
• Resonance Frequency 33%
• Bandpass Filter 33%
• Bias Voltage 33%
• Electron Optical Lithography 33%
• Beam Model 33%
• Sensing Electrode 33%
• Silicon on Insulator 33%
• Filtration 33%
• Beam Surface 33%
• Nanoelectromechanical System 33%
• Resonator 33%
• Analytical Model 33%
• Thickness Ratio 33%

Material Science

• Arch 100%
• Electron Optical Lithography 20%
• Silicon on Insulator 20%
• Nanoelectromechanical System 20%
• Resonator 20%

Keyphrases

• Excitation Voltage 33%
• Nano-arch 33%